MEMS

Microelectromechanical systems combine microscale mechanical elements with electrical circuits, often on a single chip. They sense, move, or control physical phenomena.

Micromachining: Fabrication processes that create structures and features at micrometer scales. Etching and deposition turn thin films and substrates into MEMS structures.
Accelerometer: An instrument that measures acceleration, including changes in velocity and direction. Micromachined accelerometers detect motion in phones, vehicles, and industrial equipment.
Microfabrication: The fabrication of structures and devices with micrometer-scale features. MEMS are a major device family produced through microfabrication.
NEMS: Nanoelectromechanical systems combine nanoscale mechanical elements with electrical functions. NEMS push electromechanical devices below the scale typical of MEMS.
Surface micromachining: A fabrication method that builds movable structures from deposited thin films above a substrate. It creates suspended beams and membranes by removing sacrificial layers.
Gyroscope: An instrument that measures angular velocity or maintains orientation using rotational motion or related physical effects. MEMS gyroscopes use vibrating structures to measure rotation in compact devices.
Semiconductor device fabrication: Processes that form electronic devices and interconnections on semiconductor wafers. MEMS often share wafer processing equipment and steps with integrated circuits.
Integrated circuit: An electronic circuit whose components are fabricated together on a semiconductor substrate. Integrated circuits process signals; MEMS add moving or deformable physical structures.
Bulk micromachining: A fabrication method that shapes a substrate by selectively etching its material. It forms cavities, diaphragms, and other structures directly in silicon.
Digital micromirror device: A semiconductor chip containing an array of individually tilting microscopic mirrors. Its MEMS mirror array modulates light in digital projection systems.

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