Nanoelectromechanical systems

Nanoelectromechanical systems (NEMS) combine electrical functions with mechanical components whose dimensions are typically measured in nanometers. Their small size enables high-frequency operation and sensitivity to tiny forces, masses, and motions.

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Nanomechanical resonator: A nanoscale mechanical structure that oscillates at a characteristic resonant frequency. Its resonant motion is a core way NEMS detect forces, masses, and signals.
Mass spectrometry: An analytical technique that identifies ions by measuring their mass-to-charge ratios. NEMS resonators can detect individual molecules through the mass they add.
Nanofabrication: The fabrication of structures and devices with features measured in nanometers. NEMS depend on techniques that define, release, and connect nanoscale moving structures.
Microelectromechanical systems: Devices that integrate electrical functions with mechanical components at micrometer scales. MEMS use similar architectures, but their components are generally larger than NEMS components.
Richard Feynman: An American theoretical physicist known for work in quantum electrodynamics and influential lectures on physics. His 1959 lecture, “There's Plenty of Room at the Bottom,” anticipated manipulation and engineering at small scales.
Electromechanical transduction: Conversion between electrical signals and mechanical motion, or between mechanical motion and electrical signals. NEMS need transduction to drive moving parts and read their motion.
Scanning probe microscopy: A family of microscopy methods that maps surfaces using a sharp probe moved close to them. NEMS sensors share the tiny probes and force-sensitive mechanics used in this imaging family.
Electron-beam lithography: A patterning method that writes fine features by scanning a focused electron beam across a resist. It can define nanoscale geometries that conventional optical lithography cannot easily resolve.
Nanoelectronics: Electronic devices and circuits that use nanoscale materials or structures. Nanoelectronics can be nanoscale without integrating mechanical motion, unlike NEMS.
K. Eric Drexler: An American engineer and author associated with the development of molecular nanotechnology. His popularization of nanotechnology helped shape the broader context in which NEMS emerged.